Tool Talks with Kurt Lesker


9:00am-9:30am Welcome & Coffee

9:30am-12pm PVD Techniques with Rob Belan - Technical Director, PVD Products Resistive thermal evaporation (considerations and application)

  • Resistive thermal evaporation (considerations and application)
  • Electron beam evaporation (considerations and application)
  • Magnetron sputtering (application and new/trending technologies such as reactive sputtering and HiPIMS)

12:00pm-1pm Networking Lunch sponsored by Kurt Lesker Company

1:00pm-2:30pm Advanced ALD with Bruce Rayner - Principal Scientist, Atomic Layer Deposition

  • Tool design considerations to enable high performance ALD (Thermal and PEALD). 
    • Ultra-High Purity (UHP) process capability and design requirements
    • Sources of background impurities. 
    • Advanced Process Gas Flow Considerations
  • Film and process examples, such as high-quality metals and nitride films, enabled with high performance ALD:
    • Investigation of Oxygen Incorporation During TiN Plasma Enhanced ALD by In-Situ Elipsometry
    • Plasma Enhanced ALD of Ru Using Ru(EtCp)2 & O2-Plasma on Pt.

2:30pm-2:45pm Break with refreshments

2:45pm-3:30pm Tool Design considerations (mechanical systems for the Nanofab) PVD System Mechanical Design Considerations with Dan Carlsen -Mechanical Engineer New & Emerging PVD Products

  • Clean room integration options and modular construction
    • Expansion and Configuration, Synergy with Mechanical Components, Pump conductance, Options for multiple doors for access, Refit chamber for new deposition requirements
  • Ease of configuration for experiments 
    • Cathode Throw and angle adjustments, 
    • Various boat types and sizes considerations 
    • Service/maintenance (shielding, shutters, maintenance access)
  • Sample handling 
    • Batch vs. Load-Locked
    • Single Substrate vs. Cassette 
    • Substrate transfer: Benefits and Limitations 
    • Non-traditional substrate materials-size and mounting options
  • Deposition source configurations (spattering source options, ion sources for sample preparation, multi-source systems
  • System customization
  • Mechanical modularity and synergy with control system and software

3:30pm-4:15pm PVD System Software and Control System Design Considerations with Ryan Kremser - Engineering Supervisor & Lead KJLC Software Design Center of Excellence

  • Lab equipment integration including multi-user setup & lab lockouts
  • Data collection for both users and process
  • Upgrade flexibility and expandability and ultimate platform reliability 
  • Controller and PC separation
  • Device integration, logging and tracking of actions

4:15pm Workshop closes, networking opportunity