9:00am-9:30am Welcome & Coffee
9:30am-12pm PVD Techniques with Rob Belan - Technical Director, PVD Products Resistive thermal evaporation (considerations and application)
- Resistive thermal evaporation (considerations and application)
- Electron beam evaporation (considerations and application)
- Magnetron sputtering (application and new/trending technologies such as reactive sputtering and HiPIMS)
12:00pm-1pm Networking Lunch sponsored by Kurt Lesker Company
1:00pm-2:30pm Advanced ALD with Bruce Rayner - Principal Scientist, Atomic Layer Deposition
- Tool design considerations to enable high performance ALD (Thermal and PEALD).
- Ultra-High Purity (UHP) process capability and design requirements
- Sources of background impurities.
- Advanced Process Gas Flow Considerations
- Film and process examples, such as high-quality metals and nitride films, enabled with high performance ALD:
- Investigation of Oxygen Incorporation During TiN Plasma Enhanced ALD by In-Situ Elipsometry
- Plasma Enhanced ALD of Ru Using Ru(EtCp)2 & O2-Plasma on Pt.
2:30pm-2:45pm Break with refreshments
2:45pm-3:30pm Tool Design considerations (mechanical systems for the Nanofab) PVD System Mechanical Design Considerations with Dan Carlsen -Mechanical Engineer New & Emerging PVD Products
- Clean room integration options and modular construction
- Expansion and Configuration, Synergy with Mechanical Components, Pump conductance, Options for multiple doors for access, Refit chamber for new deposition requirements
- Ease of configuration for experiments
- Cathode Throw and angle adjustments,
- Various boat types and sizes considerations
- Service/maintenance (shielding, shutters, maintenance access)
- Sample handling
- Batch vs. Load-Locked
- Single Substrate vs. Cassette
- Substrate transfer: Benefits and Limitations
- Non-traditional substrate materials-size and mounting options
- Deposition source configurations (spattering source options, ion sources for sample preparation, multi-source systems
- System customization
- Mechanical modularity and synergy with control system and software
3:30pm-4:15pm PVD System Software and Control System Design Considerations with Ryan Kremser - Engineering Supervisor & Lead KJLC Software Design Center of Excellence
- Lab equipment integration including multi-user setup & lab lockouts
- Data collection for both users and process
- Upgrade flexibility and expandability and ultimate platform reliability
- Controller and PC separation
- Device integration, logging and tracking of actions
4:15pm Workshop closes, networking opportunity