October 31, 2019
MIT.nano research specialist Gary Riggott (right) is training users on the AJA electron-beam evaporator system, which was part of the Building 39 5th floor tool move to MIT.nano.
The eBeam-AJA is a metal evaporator that uses an electron beam to heat a target under ultra-high vacuum. The electron beam that heats the target material sweeps in a pattern to create a small melted area of material. The target atoms then evaporate and precipitate into solid form onto the sample. Without a good vacuum, film quality suffers. The deposited film is measured with a crystal. Power levels and ramp-up condition for the electron beam as well as crystal parameters are specific to the material deposited.