Facility Updates

Transitioning out of LAM Etchers & VTR

Both the VTR and the LAM590-TRL encountered hardware problems from the Building 39 power shutdown in November. As a result, we are unable to bring them back up, and the VTR and LAM590-TRL will be decommissioned.

With the AME5000 back online and the three SAMCO etchers taking on the role for fluorine and chlorine chemistry etching, and no tool uses since September on both, the ICL LAM490B and LAM590-ICL will be shut down on March 1st and then decommissioned.

Read more in this update.

HS-50 arrives at MIT.nano

The Elionix HS-50 arrived at MIT.nano in late December. Read more about installation and when this tool will be available to facility users in this update.

Winter break hours

During the upcoming holidays, MIT.nano will be closed to regular users during the two extended weekends (December 24–26, and December 31–January 2). We will operate on "after hours" schedule, and 24-hour users can continue to use the fab, like on all holidays.

For the four days between the long weekends, several staff have volunteered to help replenish supplies in Buildings 12 & 39, and to maintain lab safety including chemicals/waste. That means regular users can use the fabs 9 AM – 5 PM Monday (12/27) – Thursday (12/30). 

Read more, and see a detailed schedule, in this update.

Upcoming holiday schedule

Fab.nano will be closed for Thanksgiving as well as the extended MIT Winter Break. Read dates and policies for holiday operations in this update.