Facility Updates

Winter break hours

During the upcoming holidays, MIT.nano will be closed to regular users during the two extended weekends (December 24–26, and December 31–January 2). We will operate on "after hours" schedule, and 24-hour users can continue to use the fab, like on all holidays.

For the four days between the long weekends, several staff have volunteered to help replenish supplies in Buildings 12 & 39, and to maintain lab safety including chemicals/waste. That means regular users can use the fabs 9 AM – 5 PM Monday (12/27) – Thursday (12/30). 

Read more, and see a detailed schedule, in this update.

Upcoming holiday schedule

Fab.nano will be closed for Thanksgiving as well as the extended MIT Winter Break. Read dates and policies for holiday operations in this update.

Holiday: Indigenous Peoples Day

Fab.nano will be closed on Monday, October 11th in observance of Indigenous Peoples Day. As usual during Institute holidays, the fabs in Buildings 39 & 12 will not be staffed, so they will be open only to qualified 24-hr users.

Read more in this update.

New tool: Asher ESI

MIT.nano's new ESI asher was started up this week. It is capable of fast ashing from pieces up to 8” wafers, and has a 25-wafer cassette.

Read more about this new tool in this update.

New lower level spin coater

The Spinner-Resist-L10 (new tool) is now online in L10. For usage/what-to-spin, it is identical to Spinner-Resist-U12. This new spinner has a programmable exhaust during spinning, which can be beneficial when optimizing uniformity on thick resists.

Read more in this update.