Facility Updates

MIT.nano's new ESI asher was started up this week. It is capable of fast ashing from pieces up to 8” wafers, and has a 25-wafer cassette.

Read more about this new tool in this update.

The Spinner-Resist-L10 (new tool) is now online in L10. For usage/what-to-spin, it is identical to Spinner-Resist-U12. This new spinner has a programmable exhaust during spinning, which can be beneficial when optimizing uniformity on thick resists.

Read more in this update.

A helpful reminder on how to bring samples into the cleanroom, move photoresist coated samples between floors and, when necessary, bring samples out. Read more in this update.

MIT.nano is installing a new dry/wet oxidation tube in Fab-12 during Phase 2+ this fall. The ICL and TRL tubes will remain operational in Fab-39 during this transition. Read more in this update.

All of the major phase II tools have now moved from Building 39 to Building 12. Contractors are in the process of connecting the systems. MIT is experiencing delays in the process cooling water installation that will cause some delays. Read more in this update.

This facility update contains a reminder of the upcoming move of EML & TRL photo / wet bench capabilities, as announced earlier this summer. Users should continue to move your processes to Building 12 to minimize disruptions to your work. Read more.

All samples, unless actively in use, need to be stored in user cubbies or taken out of the lab. If you are missing samples, they may be in the "lost-and-found" storage. Read more in this update.

Boston saw record or near-record temperatures at the end of June with very high dew points, so it was a good time to check temperature and humidity in MIT.nano's cleanroom. The charts in this update show the stability of the facility's temperature, humidity, and dew point (related to the amount of water in the air), over the last 14 days.

Read the update.

In observance of the Fourth of July, the Institute will be closed on Friday, July 2 and Monday, July 5. Fab.nano will operate on a holiday schedule.

Read more in this update.

The weekly "Happy Complaint Hour" is moving to a new date and time! Join MIT.nano staff on Thursdays at 4pm to discuss fab-related issues or questions.