Stable conditions reported in MIT.nano during summer heat

Boston saw record or near-record temperatures at the end of June with very high dew points, so it was a good time to check temperature and humidity in MIT.nano's cleanroom. The charts below compare temperature, humidity, and dew point (related to the amount of water in the air), over the last 14 days. The fab data was taken in the lithography bays, on both the first and third floors of Building 12. MIT.nano staff are happy to report the results were very stable.

Fab humidity check June 2021

Fab temperature stability check June 2021

Fab dew point check June 2021