Cleanroom Performance
- Cleanliness:
SQFT
Class
Max Particles ft -3 (FED-STD-209E)
ISO 14644*
d ≥ 500 nm
d ≥ 5,000 nm
12,300
100
100
ISO 5
8,900
1,000
1,000
7
ISO 6
9,400
10,000
10,000
70
ISO 7
19,300
RA
Not Classified
*Return air
- High Hazard H5 Occupancy: non-rated (4 CF SF-1) & chemical-intensive (maximum storage and use of highly toxic, corrosive, and pyrophoric materials)
- TGMS: 191 points of detection (base build)
- Temperature: 68° ±2° F
- Humidity: 44 ±5% RH
- Sound (5 suites): acoustically quiet NC-25 (e.g. 54db at 63Hz and 21dB at 8kHz)
- EMI (5 suites): 30 nT p-p at 60 Hz
- Vibration: vibration control VC-C, D, F, and G (e.g. 780 nm s-1 or ~12 nm at 10Hz)
*Equivalent: < 500 nm not defined in FED-STD-209E
EM 6-8 Suite Performance (3)
- Temperature: 70° ±2°F with 0.36° F hr-1 and 0.09° F min-1 stability
- Humidity: 40 ±5% RH
- TGMS: available
- Sound: acoustically quiet NC-25
- EMI: 10 nT p-p at 60 Hz
- Vibration: extreme vibration control VC-G
EM 1-5, 9-11 Suite Performance (8)
- Temperature: 70° ±2°F with 0.9° F hr-1
- Humidity: 55 ±5% RH
- TGMS: available
- Sound: acoustically quiet NC-25
- EMI: 10 to 30nT p-p at 60 Hz
- Vibration: extreme vibration control VC-E & G
Prep & Analytical Suite Performance (2)
- Temperature: 70° ±2.0° F
- Humidity: 55 ±5% RH
- TGMS: available
- Sound: acoustically quiet NC-35 (e.g. 60 db at 63Hz and 32 dB at 8kHz)
- Vibration: vibration control VC-E
X-Ray Suite Performance (1)
- Temperature: 70° ±2.0° F
- Humidity: 55 ±5% RH
- TGMS: available
- Sound: acoustically quiet NC-50 (e.g. 71db at 63Hz and 47dB at 8kHz)
- Vibration: excellent vibration control VC-E
Water Performance
- Reverse Osmosis Deionized Water: ASTM Type E1.2 microelectronics grade water (18.2 megohm-cm, very low particle)
- Process Cooling Water (58°F): Fully flow bag filtration to 100 microns, polished to control resistivity, distributed in all non-ferrous piping (SS/PVC).
Cleanroom Hood/Wet Bench Capabilities
- x11 - Wet Process Benches
- x17 - Corrosive Fume Hoods
- x16 - Solvent Fume Hoods
- x12 - General Fume Hoods
Exhaust Capabilities (w/ heat recovery)
- Corrosive: 105,000 CFM w/ -0.5" static @ POC
- "Scrubber": 1500 CFM w/ -3.0" static @ POC
- Solvent: 30,000 CFM w/ -0.5" static @ POC
- General: 90,000 CFM w/ -0.5" static @ POC
General
- Freight Elevator: 12' x 12' x 10' with a load capacity of 14,000 lbs. serving all five levels
- CDA: ISO 8573-1 class 1-1-1 (low particle — see chart below, ≤-70°C dew point, oil free)
Max Particles m-3
100 nm < d < 500 nm
500 nm < d < 1,000 nm
1,000 nm < d < 5,000 nm
≤20,000
≤400
≤10
- Emergency Generator: 1,500 kW capacity with automatic switch gear located above grade to improve resiliency
- UHP Nitrogen: Grade 5.5+ delivered remotely from electronics grade 11,000 gal LN2 tanks and 3 nm filtration skid
- UHP Oxygen: Bulk Grade 3.5 with 20 nm filtration skid
- HPM Storage: bulk storage rooms for corrosive / toxic / pyrophoric / flammable materials classified H2 / H3 / H4 occupancy
- Gas Cabinets: 23, 3-cylinder fully automatic cabinets for storage and delivery of corrosive / toxic / pyrophoric / flammable gasses to both levels of cleanroom. H2/H3/H4 high hazard "bunker" storage for increased maximum allowable quantity (MAQ)
- VMBs: 62, 8-stick semi-automatic VMBs for the distribution of corrosive / toxic / pyrophoric / flammable gasses to both levels of cleanroom
- Process Gas Piping: ~15,000ft of 316L, 10Ra max. electropolished process piping from gas cabinets to VMB. piping. Monitored double containment as required.
- AWN: high-performance turbulent-flow system with ~100 gpm throughput, automatic pH metering, and 2,800 gal full capacity with ability to lock-out effluent and re-treat if not compliant
- Lab Waste System: fire-resistant polypropylene (FRPP) piping throughout building