Facilities and Infrastructure

Cleanroom Performance

  • Cleanliness: 

    SQFT

     

    Class

    Max Particles ft -3 (FED-STD-209E)

    ISO 14644*

    d ≥ 500 nm

    d ≥ 5,000 nm

    12,300

    100

    100

     

    ISO 5

    8,900

    1,000

    1,000

    7

    ISO 6

    9,400

    10,000

    10,000

    70

    ISO 7

    19,300

    RA

    Not Classified

     

    *Return air

         
  • High Hazard H5 Occupancy: non-rated (4 CF SF-1) & chemical-intensive (maximum storage and use of highly toxic, corrosive, and pyrophoric materials)
  • TGMS: 191 points of detection (base build)
  • Temperature: 68° ±2° F
  • Humidity: 44 ±5% RH
  • Sound (5 suites): acoustically quiet NC-25 (e.g. 54db at 63Hz and 21dB at 8kHz)
  • EMI (5 suites): 30 nT p-p at 60 Hz
  • Vibration: vibration control VC-C, D, F, and G (e.g. 780 nm s-1 or ~12 nm at 10Hz)

*Equivalent: < 500 nm not defined in FED-STD-209E

EM 6-8 Suite Performance (3)

  • Temperature: 70° ±2°F with 0.36° F hr-1 and 0.09° F min-1 stability
  • Humidity: 40 ±5% RH
  • TGMS: available
  • Sound: acoustically quiet NC-25
  • EMI: 10 nT p-p at 60 Hz
  • Vibration: extreme vibration control VC-G

EM 1-5, 9-11 Suite Performance (8)

  • Temperature: 70° ±2°F with 0.9° F hr-1 
  • Humidity:  55 ±5% RH
  • TGMS: available
  • Sound: acoustically quiet NC-25
  • EMI: 10 to 30nT p-p at 60 Hz
  • Vibration: extreme vibration control VC-E & G

Prep & Analytical Suite Performance (2)

  • Temperature: 70° ±2.0° F
  • Humidity: 55 ±5% RH
  • TGMS: available
  • Sound: acoustically quiet NC-35 (e.g. 60 db at 63Hz and 32 dB at 8kHz) 
  • Vibration: vibration control VC-E

X-Ray Suite Performance (1)

  • Temperature: 70° ±2.0° F
  • Humidity: 55 ±5% RH
  • TGMS: available
  • Sound: acoustically quiet NC-50 (e.g. 71db at 63Hz and 47dB at 8kHz)
  • Vibration: excellent vibration control VC-E

Water Performance

  • Reverse Osmosis Deionized Water: ASTM Type E1.2 microelectronics grade water (18.2 megohm-cm, very low particle)
  • Process Cooling Water (58°F): Fully flow bag filtration to 100 microns, polished to control resistivity, distributed in all non-ferrous piping (SS/PVC).

Cleanroom Hood/Wet Bench Capabilities

  • x11 - Wet Process Benches
  • x17 - Corrosive Fume Hoods
  • x16 - Solvent Fume Hoods
  • x12 - General Fume Hoods

Exhaust Capabilities (w/ heat recovery)

  • Corrosive: 105,000 CFM w/ -0.5" static @ POC
  • "Scrubber": 1500 CFM w/ -3.0" static @ POC
  • Solvent: 30,000 CFM w/ -0.5" static @ POC
  • General: 90,000 CFM w/ -0.5" static @ POC

General

  • Freight Elevator: 12' x 12' x 10' with a load capacity of 14,000 lbs. serving all five levels
  • CDA: ISO 8573-1 class 1-1-1 (low particle — see chart below, ≤-70°C dew point, oil free)

    Max Particles m-3

    100 nm < d < 500 nm

    500 nm < d < 1,000 nm

    1,000 nm < d < 5,000 nm

    ≤20,000

    ≤400

    ≤10

       
  • Emergency Generator: 1,500 kW capacity with automatic switch gear located above grade to improve resiliency
  • UHP Nitrogen: Grade 5.5+ delivered remotely from electronics grade 11,000 gal LN2 tanks and 3 nm filtration skid
  • UHP Oxygen: Bulk Grade 3.5 with 20 nm filtration skid
  • HPM Storage: bulk storage rooms for corrosive / toxic / pyrophoric / flammable materials classified H2 / H3 / H4 occupancy
  • Gas Cabinets: 23, 3-cylinder fully automatic cabinets for storage and delivery of corrosive / toxic / pyrophoric / flammable gasses to both levels of cleanroom. H2/H3/H4 high hazard "bunker" storage for increased maximum allowable quantity (MAQ)
  • VMBs: 62, 8-stick semi-automatic VMBs for the distribution of corrosive / toxic / pyrophoric / flammable gasses to both levels of cleanroom
  • Process Gas Piping: ~15,000ft of 316L, 10Ra max. electropolished process piping from gas cabinets to VMB. piping. Monitored double containment as required.
  • AWN: high-performance turbulent-flow system with ~100 gpm throughput, automatic pH metering, and 2,800 gal full capacity with ability to lock-out effluent and re-treat if not compliant
  • Lab Waste System: fire-resistant polypropylene (FRPP) piping throughout building