Facility Updates

MIT.nano photoresists

MIT.nano has three standard photoresists in Building 12. Learn more, including where to find the recipes, in this update.

MLK Holiday Hours

Fab.nano will operate under holiday guidelines on Monday, January 18, in observance of Martin Luther King Jr. Day, a national and Institute holiday.

Tool update: SAMCO etcher

The new mixed-gas SAMCO etcher was placed and leveled at MIT.nano on Friday, January 8, 2021. Installation is scheduled for completion by the end of February.

Holiday closing Dec. 24 – Jan. 4

MIT will be closed on Thursday, 12/24 and Friday, 12/25 for the Christmas Day holiday so Fab.nano will be closed. 

This year MIT has extended the holiday period to include the following week of 12/28 through New Years Day, Friday 1/1/21. As usual during Institute holidays, the fabs in Building 39 and Building 12 will not be staffed, so they will be only open to qualified 24hr users who must follow the buddy policies in each fab.

Phase II tool move schedule

MIT.nano is preparing for phase II of the tool move from Building 39 to Building 12. Litho/metrology tools are moving first, in February and March. Once process cooling water is installed by MIT, the vacuum tools will be able to move, tentatively in May/June/July.

December user meeting video

The December MIT.nano user update meeting focused on the upcoming phase II tool move from Building 39 to Building 12. Watch the video in this update to learn more about logistics, tool lists, tentative schedules, and what to expect during the transition.

Supply limitations: Lab gloves

MIT.nano has received notification of additional supply limitations with Hand Protection Products from our vendors. Please follow gowning protocols and conserve supplies as much as possible. The community’s diligence in conserving these supplies will allow the lab to continue operation without interruption.

December MIT.nano user meeting

The next MIT.nano user update meeting will be held on Wednesday, December 16, at 2pm via Zoom. The main focus of the December meeting will be the upcoming phase II tool move from Building 39 to Building 12. Read more in this facility update.

8” barrel asher arrives at MIT.nano

The 8” barrel asher for Fab-12 has finally arrived! It has been moved into position in bay 6U and will be installed over the next two weeks (gas, electric, exhaust, bulkhead).

Nitrile glove and blue bootie shortages

Vendors are encountering global raw material shortages and supply chain constraints in regards to cleanroom nitrile gloves and blue booties.

Learn about new processes to maintain MIT.nano supplies in this update.