January 11, 2021
The new mixed-gas SAMCO etcher was placed and leveled at MIT.nano on Friday, January 8, 2021. Installation is scheduled for completion by the end of February. However, there are still uncertainties due to COVID-19 travel restrictions for SAMCO engineers coming from outside of Massachusetts. Tool progress dates will be shared once they are confirmed.
The new SAMCO ICP etcher arrived at MIT.nano in late August. This etcher was purchased through funding from the Lord Foundation and the combination of fluorine, chlorine and bromine chemistry will provide broad etching capabilities for exploratory materials.