Facility Updates

The new spin coater just went live at MIT.nano. In this photo we’re setting up to film our first training videos, simultaneously from inside the hood and outside.

This update contains information about new user orientations, as well as training slots for wet chemical processing and emergency preparedness.

The new rapid thermal annealing (RTA) system cleared customs and has been delivered to MIT.nano.

The next MIT.nano user meeting will be Wednesday, August 26 from 2-3pm. Check your email for Zoom information.

Several MIT.nano users have requested the tool status for coaters and wet benches, as well as when they will go online. Most are available now! Details on these tools can be found in this update.

MIT.nano staff have started posting daily humidity values as comments on the TRL coater as of August 1. More detailed data-logger results are being sent via email that help highlight recent fluctuations.

This update contains information about the general purpose coater for both manual pieces and wafers, the new HMDS oven, and the Semilab ellipsometer.

Find information about new and existing tool training, new user orientations, and wet bench chemical training sessions in this post.

Since July 8, when coming out of the shutdown, there has been significant effort around temperature/humidity and duct smoke detectors. Across over 24 work orders that facilities opened, various issues were documented and resolved. A rough list of control and hardware problems that were addressed are listed in this post.

MIT.nano is looking for new student members on the Processing Technology Committee (PTC). The PTC meets weekly to review and approve new processes as well as all 24-hr status requests.