Facility Updates

The new SAMCO ICP etcher has arrived and was brought into the MIT.nano cleanroom. This etcher was purchased through funding from the Lord Foundation and the combination of fluorine, chlorine and bromine chemistry will provide broad etching capabilities for exploratory materials.

MIT.nano asked on Labnetwork about laser micromachining and received many great suggestions on vendors and services. See the list with links in this post.

Following up on Fab.nano tool updates from last week, MIT.nano staff report on the latest information, as of August 21, in this post.

We are able to get new users into the lab, but COVID-19 precautions have made some trainings more challenging or lowered the throughput. Thus, we’re in the middle of changing our orientations and make trainings more scalable.

Updates on gowning procedures and availability for Fab-12 and Fab-39.

Last week several users wrote in requesting tool status. Here is a quick list of important tools and their timelines. 

MIT.nano is looking to explore new feedback mechanisms for Fab.nano, both in bldg. 12 and 39. Every Wednesday evening (6-7pm), MIT.nano staff will host a 1-hour combination of “small comment session” and “social” hour.

The bulkhead work on the new HMDS oven has been completed, and next week the installation will be completed before starting up the system.

The UV-VIS and Fluorimeter are now available to MIT.nano users in NanoMat-U2 third floor cleanroom space.

To expand thin-film measurement capabilities available to its researchers, MIT.nano has acquired a Semilab SE-2000 Spectroscopic Ellipsometer. The instrument has been installed and qualified in the third-floor cleanroom in Building 12, and is now available for training and use.

Read more.