Following up on Fab.nano tool updates from last week, MIT.nano staff report on the latest information, as of August 21, below.
AME5000
Work is ongoing to replace the RF generator for chamber B. That required shutting the cooling water loop for the RF generators, which also took chamber A offline. We tried using in‐house generators to replace chamber B's faulty unit, but the generators we have aren't compatible (wrong power rating in one case, and I/O cable mismatch on the higher power generator). Part have been ordered from AMAT. The new generator arrived, but was the wrong version, still had an I/O mismatch. Have an adapter cable now, will install next week (August 24). Tool could still be ready later that week.
Concept1
(Status unchanged since 8/14) The robot is not homing and gets stuck on something. This is not going to be an easy problem to debug. Thus, we are currently focusing on the other critical tools first (e.g. AME5000, AJA, Oxford‐100), once those are solved, we will start looking into the Concept1. Likely the week of August 31 with status update on September 4.
SAMCO
(Status unchanged since 8/14) The electrostatic chuck replacement parts have arrived from Japan. But scheduling the installation is currently a problem, due to COVID-19 travel/scheduling restrictions into Massachusetts. This is not a remote‐solvable installations, unfortunately. Thus, we have zero predictability, but we estimate it will take several more frustrating weeks, at least. The tool is operable with restrictions until the repairs can start.
Endura
Handler won't run in automatic mode, keeps giving "motor sync lost" errors. Ch. 3 needs a new cryo; haven't explored replacement yet. Working with AMAT on troubleshooting robot, suspect bad contact in one of the connections, probably related to humidity issues earlier in the summer. We will provide a timeline on August 28.
Rainbow
New computer was ordered before COVID-19 shutdown, but supplier was struck by warehouse access issues during shutdown and is still working on shipping it out. Should get more clarity on shipping next week and update on August 28.
Sts‐Pegasus
The chamber turbo indicated a bearing failure issue. The pump was sent for repair, but due to the repair facility moving location and the COVID pandemic, troubleshooting was delayed. Testing this week points to the turbo controller being the issue. A new controller will be ordered. We will provide a timeline on August 28.
Oxford‐ALD
(Status unchanged since 8/14) The chamber heater TC was damaged from lab humidity problems in July, and a new one was ordered. It should have arrived this week. Once installed, we should be up and running shortly after, likely by the end of August.
Oxford 100
Harness reconstruction this week went pretty well. Having issues with an Optical sensor (24V), but only getting 9V readback. Delivery times from Digi‐Key/Newark/Allied are Sept 19th/78 days/minimum order 200 pieces respectively. Will order those if necessary. Reached out to Oxford for part and support yesterday to see if we can expedite. Also discovered Blanket PO had lapsed, submitting paperwork to get that reissued. We will provide a timeline on August 28.
eBeamFP
This week, we received the quote for rebuild, shipped out the compressor, and got it repaired. It will arrive at MIT from California on August 27. Install will follow, which puts the remote work with F/S on or about August 31. Around September 4 would probably a good estimate for earliest up‐time on the tool.
eBeam‐Au
We replaced the Au crucible after receiving reports of contamination. Resistivity measurement pointed to contamination. Will run EDX to better understand source of contamination. Will update next week if we find time to complete the analysis.