Instrument can provide information on various properties of thin films via a combination of optical characterization and modeling
To expand thin-film measurement capabilities available to its researchers, MIT.nano has acquired a Semilab SE-2000 Spectroscopic Ellipsometer. The instrument has been installed and qualified in the third-floor cleanroom in Building 12, and is now available for training and use.
In nanofabrication, it is important to characterize and understand the physical, mechanical, and chemical properties of the different types of thin film materials used to build devices. Ellipsometry is a particularly valuable technique for non-destructive optical characterization of a wide variety of thin film materials—such as semiconductors, dielectrics, polymers, and metals—as well as complex multilayered structures. By measuring the change in the light polarization upon interaction with the matter, information such as thickness, refractive index, dielectric permittivity, composition, and doping can be revealed.
Semilab SE-2000 spectroscopic ellipsometer will augment the MIT.nano cleanroom metrology capabilities by addressing the need for a broad spectral range (from 245 nm–1700 nm), autofocus, automatic goniometer for incidence angle adjustment (20-90 degrees), and large area (300 mm) automatic stage with mapping capabilities.
With Microspot optics and an optical camera for region of interest visualization, the instrument is able to uniformly assess samples ranging from pieces up to 300 mm wafers. The SE-2000 replaces the capabilities that had been provided by the decommissioned Tencor UV1280, which was located in the second-floor Integrated Circuits Laboratory (ICL) in Building 39.
Additional specifications for the SE-2000 include:
| Spectral Range | UV-NIR (245-1700 nm) |
| Compensator | Rotating |
| Goniometer | 20-90 degrees, automatic |
| Stage | 300 mm, r-theta with mapping and autofocus |
| Spot Size | Microspot (365 x 470 mm at 75 degrees) |
| Camera | CCD, 1.2 Mpx |
| Film Library and Support | Included, local support in MA |
Semilab designs and manufactures metrology equipment for the characterization of semiconductor and photovoltaic materials, and for the R&D and manufacturing processes of semiconductor devices, flat panel displays, and solar cells.
For more information about MIT.nano’s tools and instruments, visit nanousers.mit.edu.