January 25, 2021
Building 12 has three standard photoresists:
AZ3312 – Positive resist (replaces SPR700)
nLOF2035 – Negative resist for liftoff (replaces AZ5214E)
AZ10XT – Positive thick resist (replaces AZ4620)
SOPs and recipes for these are currently in a booklet by the spinner. Some recipes are also posted as comments to the tool by users. MIT.nano staff will also post the SOP and data to the fab tools in the coming days.
Other resists stocked are SU8-2000 varieties and MR-DWL (MLA-friendly SU8), PMMA 950A4/8/11. A cryo fridge is on order, and expected to arrive possibly in April, at which point we can stock HSQ in 12.