MIT.nano is preparing for phase II of the tool move from Building 39 to Building 12.
The goal is to have each tool down for less than two weeks when it is moving. We will move tools in small groups, rather than all at once (which would overload our ability to start/quality tools). The rough schedule, shared at the December user meeting, is as follows:
Litho/metrology tools are moving first, in February and March. Once process cooling water is installed by MIT, the vacuum tools will be able to move, tentatively in May/June/July.
By mid-January we will post a big-picture schedule, which will be updated along the way as tool timelines firm up and communicated via the Friday Nano digest emails. We will provide tool-specific look-aheads so that users have enough time to plan before a tool is moving (communicated to each tool’s MUMMS email list).
Email any thoughts or questions to mitnano-feedback@mit.edu.