MIT.nano's Phase II tool move from Building 39 to Building 12 will begin in February.
Due to the process cooling water (PCW) work, we will first move tools that require no cooling water (mainly lithography and metrology), and then approach tools that require PCW (mostly plasma tools) in May/June when PCW goes online. The new RTA and new SAMCO mixed-gas etcher are not subject to this delay because they are using a temporary chiller.
Schedule
A complete schedule of the tools and dates is posted at web.mit.edu/scholvin/www/nanomove/.
That schedule is the most accurate resource because it is automatically derived from the project planning and tool-move check-sheets. When a tool moves, we will block access in CORAL and post comments in the tool. Note: We are expediting the pTrack, because it will be needed for the spring 6.152 class on March 1st.
Tool Access
Once a tool has moved, it will receive a new name in CORAL. The procedure for re-qualification in CORAL depends on the tool as determined by the tool owner. For most tools (those with no change in their protocols), we will simply transfer previous tool qualifications over without any need for re-training.
For a subset of tools, however, a brief re-training may be required. This will be determined by the tool owner, after the move.
Details on re-qualification will be posted for each tool in CORAL (under the new tool name), when available.
Tool Qualifications
If there are tools critical for your research and with a delicate process, please consider helping us with pre- and post- process qualifications. This will help check that the tool is performing to your needs before as well as after the move. Please contact the tool owner for this, and cc mitnano-feedback@mit.edu.
Fab 12 Access
Most users already have Fab-12 access, and many are already using duplicate tools in Fab-12 (such as the new spinners and new MLA150 there). Please join them! Ideally ahead of the tool moves, to give you backup options and minimize disruptions during the move.
Here's how to obtain Fab-12 access:
- In MUMMS, add Fab-12 to your services and complete the trainings. Virtual zoom trainings are required.
- Sign up for Orientation: http://web.mit.edu/training/course.html?course=EHS02000c
- Sign up for wet chemical processing (for solvent/developer benches): http://web.mit.edu/training/course.html?course=EHS02006c (additional dates will be posted early next week)
We continue to add slots dynamically, as needed. If you don’t see anything, please click on “Notify Me” to receive an email when new slots are available.
The next MIT.nano user meeting will take place Wednesday, February 10 at 2pm. Registered users should check their email for more information.