Major phase II tool moves complete

All of the major phase II tools have now moved from Building 39 to Building 12. Contractors are in the process of connecting the systems. Some of the smaller tabletop tools such as the Dektak and Filmetrics will be moved by staff in the next week or two.

As of August 6 MIT.nano staff learned that MIT is experiencing delays in the process cooling water installation. This will result in delays for the larger etcher/deposition tools that have moved recently. We are waiting for more clarity and exact timelines from MIT and will let you know once we find out. Note: The eBeamFP is not impacted by this delay and is expected to be online the middle of next week (~August 11).

If you need help in finding temporary workarounds or alternatives, please contact us by either reaching out to the staff directly, or emailing