MIT.nano closed March 25 for emergency systems tests

MIT.nano's annual facilities mechanical maintenance week will take place again this year during spring break. Unique this year: Every 5+ years, MIT facilities will test the emergency and standby systems by conducting a loss of power event. This test is scheduled for Tuesday 3/25 from 7:00 AM – 2:00 PM. All labs of MIT.nano will be closed earlier that day, and some tools may be turned off the night before (to bring them to a safe state). We expect the labs to reopen around 2:00 PM that day.

In addition, abatement system media in the gas bunker will be replaced on Wednesday 3/26 into Thursday 3/27. This will only impact NH3, CH4, and dopant gases. Etchers and deposition tools should see little to no impact (only recipes that use these gases). We’ll reserve the tools if fully impacted, or place comments in CORAL about specific limitations during that time.

Thank you for your patience and cooperation in helping us keep MIT.nano safe and prepared!