Evaporator Hookup and Cryo Pump Installation

The AJA evaporator hook-up is nearing completion. The partition has been placed, so the user operation is inside the cleanroom, while the pumps are in the chase. Here's a view from inside the chase:

EBeam

The eBeam-AJA is a metal evaporator that uses an electron beam to heat a target under ultra-high vacuum. The electron beam that heats the target material sweeps in a pattern to create a small melted area of material. The target atoms then evaporate and precipitate into solid form onto the sample. Without a good vacuum, film quality suffers. The deposited film is measured with a crystal. Power levels and ramp-up condition for the electron beam as well as crystal parameters are specific to the material deposited.

The cryo pump has also been installed. Just a few more finishing touches before we can start to turn on the system and re-qualify it for use. The chase is actually already in filtered light, because the lithography bay is on the opposite side.

Cryo pump