August 23, 2019
After disconnecting and protective wrapping, the EV620 (TRL EV1) mask aligner for the soft-lithography room was moved over to MIT.nano on Tuesday, August 13. It has been installed, tested, and is ready to go! You can find this tool in Coral under (B12 / Soft-Litho / MaskAlign-SoftLitho-EV620).
EV620 is a wafer aligner/bonder that is used for aligning wafers for the EV501 bond tool or for bonding wafers with silicon-direct bonding mode. The tool operates similar to the EV1. Dust particles, wafer bow, or bad luck can lead to bubbles in the bond interface.