Semilab tool talk—Oct. 20

DATE: Tuesday, October 20, 2026
TIME: 11:00 a.m. – 1:00 p.m. ET
LOCATION: MIT.nano, 12-0168
SPEAKER: Robert J. Hillard, Senior Scientist, Semilab USA

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Semilab Mercury CV (MCV) probing system

Semilab MCVMIT.nano recently installed a state-of-the-art Semilab Mercury CV (MCV) probing system (MCV-2201) within Characterization.nano, providing researchers with a powerful tool for rapid electrical characterization of semiconductor materials and structures. The system enables capacitance-voltage (C-V), conductance-voltage (G-V), and current-voltage (I-V) measurements directly on unpatterned wafers, including epitaxial layers and dielectric structures.

The MCV-2201 uses a small, precisely controlled mercury contact to form a temporary metal-semiconductor or metal-insulator-semiconductor structure. By eliminating the need for gate patterning, metal deposition, and annealing, researchers can evaluate material and process characteristics quickly, before committing to device fabrication. The technique has applications across a wide range of semiconductor technologies, including silicon, SiC, GaN, GaAs, Ga₂O₃.

Semilab Senior Scientist Robert Hillard will introduce the capabilities of the MCV-2201 and discuss applications and measurement techniques based on Semilab's experience across these material systems. Following the presentation, attendees will have the opportunity for a hands-on introduction to the system in the MIT.nano cleanroom.

Biography

Robert J. Hillard is a senior scientist at Semilab USA with extensive experience in the electrical characterization of semiconductor materials and devices. His areas of expertise include C-V and I-V measurements, mercury-probe techniques, dielectric and interface characterization, and compound semiconductor materials. His work focuses on applying semiconductor metrology to material development, process characterization, and advanced device technologies. He has an extensive publication record, spanning more than forty years.