In the last week of July, MIT.nano had the first pilot user training on the general purpose coater (for both manual pieces and wafers). At the beginning of August the staff will meet to discuss how to best arrange training to maximize throughput. We think a lot of Fab-39 photo users will benefit from an accelerated switch over to Fab-12 in August. We will share precise timelines as soon as possible, as well as how we will simplify training procedures (we’ll likely group similar benches together).
The new Fab-12 HMDS oven is being installed and installation is expected to be complete August 14. After install is complete, we need to check the recipes and setup to make sure it actually works. Any users interested in being part of that effort as pilot testers can email mitnano-feedback@mit.edu. We expect the system to be broadly available by August 28.
The Semilab ellipsometer will be on CORAL starting August 1. It’s called Ellipsometer-Semilab-SE2000 under Fab.nano / B-12 / Metrology in CORAL. For training contact Paul Tierney.