Several MIT.nano users have requested the tool status for coaters and wet benches, as well as when they will go online. Detailed updates on these tools can be found below.
Coaters
The Spinner-AllPurpose is ready and will go online the week of August 10, after pilot testing. Training starts August 14. Contact Dave Terry to schedule. Make sure you have taken the wet chemical processing prerequisite training for this tool (listed in Atlas).
- Our priority is to get everyone transferred over and trained on this coater. We’re exploring training video options, which will speed up the training. We’ll update next week with specifics and timelines.
- After the AllPurpose, we will bring the other coaters online (EBL coater and plumbed resist), because there’s still a bit of hardware work needed, and the “Spinner-AllPurpose” offers the same capabilities.
Note: For SU8 and soft lithography work, we have a dedicated tool: Spinner-SU8, which has been online. Contact Kurt for training.
Solvent & Developer Wet Benches
These are available now!
- No in-person training is required, but you need to complete the general wet chemical processing training (listed in Atlas).
- Everyone who already took the training will get qualified on CORAL via a bulk upload that was initiated August 7. This includes all solvent and developer benches under “Litho-Hoods” and “Soft-Litho-Hoods.” It does NOT include the acid benches, which still require in-person training (see below).
- Not all benches are ready yet, as there are a lot of duplicate benches. Please don’t use them if RED in CORAL.
- CORAL names of each bench or hood are on a nametag on each tool, to make it easier to figure out what’s what.
- This week we re-organized the CORAL tree for the Fab-12 wetbenches, to reduce clutter. All of the Fab-12 developer and solvent benches are now under category “Litho-Hoods” (or “Soft-Litho-Hoods”). Actual tools are under “Litho” and “Soft-Litho”.
- You can use a bench/hood if both of these are true: the tool is GREEN in CORAL, and an “*” shows up for you behind the tool name (which means you’re qualified).
Corrosive Wet Benches
These are available now: Acid-Etch-General-U10, Acid-Etch-Tank-L06, Acid-PreClean-U06, SiliconEtch-KOH-TMAH-L06, Plating-U04
Contact Scott for training on the acid hoods. Contact Kurt for training on the plating bench.
We’ll bring more specialized benches online once the new-user training requests on the above benches decrease (likely in September). If you have a specific need that is not accommodated by the above, let us know so we can prioritize. Email mitnano-feedback@mit.edu.