October 17, 2023
RESEARCH SPECIALIST / VACUUM ENGINEER, MIT.nano, to be responsible for the operation, training, and maintenance of semiconductor research equipment within the MIT.nano facility, with a focus on vacuum technology and vacuum processing equipment. Equipment includes reactive ion etchers (RIE and DRIE), plasma etchers, ashers, plasma-enhanced chemical vapor deposition (PECVD) systems, atomic layer deposition (ALD) tools, and physical vapor deposition (PVD) equipment (e.g., eBeam evaporators and sputter deposition tools). Expertise will include etch and deposition techniques, proper gas handling, safety and storage, and hazardous material disposal. Additional duties will involve gas delivery and abatement systems and associated support equipment, including vacuum pumps and chillers.
The Research Specialist (RS) is primarily responsible for operation, training, and maintenance of semiconductor research equipment within the MIT.nano facility. Each RS has an area of specific expertise, but also requires broad knowledge of general laboratory and cleanroom protocols and operation. The RS will work as a part of a team in their area of expertise, and with other Research Specialists and Domain Experts within other areas to enable successful research within the lab.
Reporting to the Assistant Director of Operations, this RS will focus on vacuum technology and vacuum processing equipment. Equipment in this area will include reactive ion etchers (RIE and DRIE), plasma etchers, ashers, plasma-enhanced chemical vapor deposition (PECVD) systems, atomic layer deposition (ALD) tools and physical vapor deposition (PVD) equipment such as eBeam evaporators and sputter deposition tools. Expertise will include etch and deposition techniques, proper gas handling, safety and storage, and hazardous material disposal. Additional duties will expand into gas delivery and abatement systems as well as the associated support equipment for the primary equipment, including vacuum pumps and chillers. This requires being comfortable working independently in a lab environment, as well as regularly interfacing with colleagues and users in a collaborative manner.
The primary goal of MIT.nano is to enhance and enable the research and educational goals of MIT. The facility serves a large R&D community of faculty, students, industry, and staff by providing a shared environment for fabrication, study, and characterization of novel nanostructures, materials, devices, and processes.
Principal Duties and Responsibilities (Essential Functions**):
This position will support laboratory operational functions to provide services and research facilities to multiple communities inside and outside of MIT. The following outlines the responsibilities of this position in more detail:
Full ownership for equipment / tooling / instrumentation as assigned ensuring up-time, safety, and performance metrics are achieved. Typical tasks / responsibilities include:
- Read and understand electrical and mechanical drawings for various systems and subsystems
- Trouble-shoot (electro-mechanical root-cause analysis)
- Disassemble / reassemble (with / without formal documentation, schematics, blueprints, or manuals)
- Repair (with and without support from the OEM)
- Perform routine and preventative maintenance (cleaning, calibrating, or servicing)
- Create routine and preventative maintenance cadence schedules
- Develop back-up plans to reduce tool downtime for common tool problems
- Create inventory control methodologies (spares, consumables, and ancillary support equipment)
- Develop clear and concise documentation, including video documentation including best-known-methods (BKM’s) and standard operating procedures (SOP’s)
- Formalize / share / publish performance metrics
- Establish and maintain effective training protocols and documentation to enhance the user community's access to tooling and instrumentation.
- Support efforts of MIT.nano to ensure the user community has easy access to both training materials and staff.
- Run process qualification, at meaningful intervals, to enable tracking and documentation of equipment / tool / instrument performance over time.
- Interface with equipment / tool / instrument vendors that will demand a thorough knowledge of the technical details associated with the equipment.
- Attend off-site training at equipment / tool / instrument vendor sites, which could involve travel stateside and overseas. Utilize this formal training to provide users with enhanced training programs (scheduled and unscheduled). Training could include formal presentations (classroom), hands-on at the tool / instrument, and the creation of training materials.
Facility Operation and Safety
- Establish and maintain appropriate levels of knowledge and proficiency with building systems.
- Exhibit and practice safe working and housekeeping practices at all times.
- Maintain effective procedures for the safe handling and storage of hazardous production materials (gases, chemicals and waste) as well as ensuring the proper engineering and administrative controls are established and maintained for all other potential hazards (mechanical, electrical, and radiation) associated with assigned equipment / tooling / instrumentation.
- Establish and maintain appropriate levels of knowledge and proficiency regarding BKM’s for laboratory cleanroom and non-cleanroom protocols which involve multi-user and multi-project environments.
- Participation in all forms of safety process and procedures which include, but are not limited to:
- lock-out tag out programs
- EHS training
- chemical inventory
- emergency response team training sessions
- responding to emergencies including gas leaks, chemical spills, etc.
- Engage the user community, MIT.nano staff, and outside resources in a meaningful and productive manner such that the users’ process needs are met and well matched to the capabilities of the facility and the equipment within it.
- Train and supervise student and industry users and staff in proper equipment use.
- Maintain an appropriate and significant presence in the cleanroom to be available to assist users with their day-to-day processing challenges.
- Contribute to or assist with the undergraduate educational mission of MIT.nano.
- Foster an environment of teamwork and cooperation with fellow staff members, faculty, Department of Facilities staff, and the user community.
- Establish and maintain contacts with peer institutions with similar facilities in order to coordinate collaborations and mutual BKMs for operations of similar facilities.
- Establish and maintain appropriate computer literacy skills regarding both hardware and software for PC-based and PLC-based computer systems as assigned. Develop recipes, programs, and processes (workflows). Sustain the appropriate level of proficiency.
- Other duties as assigned
To what position will/does this role report? Assistant Director of Operations
What type of supervision will be received? Minimal
Which positions will this position supervise? None
Qualifications & Skills:
MINIMUM REQUIRED EDUCATION AND EXPERIENCE:
- BS in electrical, mechanical or chemical engineering, physics, chemistry, or related discipline; or an equivalent combination of education and experience.
- At least two years working in a laboratory setting.
- Experience working with hazardous materials including inert, flammable and toxic compressed gases, wet corrosive chemicals and solvents. Knowledge of chemical compatibilities and reactivity. Knowledge and experience with safe working practices for working with hazardous materials. Proficiency in hazard communication and learning/understanding safety information (e.g. Safety Data Sheets, PubChem, etc).
- Excellent written and oral communications skills as well as strong interpersonal skills and ability to work alone or within a team environment. Must demonstrate a keen interest in training the user community.
- Maturity of judgement, goal-oriented, and a personality that will allow the candidate to function in a highly research-oriented yet disciplined environment that requires strong interaction with faculty, students, and research staff.
- Ability to regularly lift and transport up to 50lbs.
- Ability to wear respiratory protection, including air-purifying respirator and self-contained breathing apparatus.
- Demonstrated ability to recognize and respond to unsafe conditions or dangerous situations.
PREFERRED EDUCATION AND EXPERIENCE:
- Experience working in a cleanroom or semiconductor process facility.
- HAZWOPER certification.
- Working knowledge of established and emerging research processes, with ability to assist researchers in experimental design.
- Experienced trainer in one-on-one interactions or in large groups (20-30 people), with the ability to convey complex ideas to personnel with diverse backgrounds and education experience.
- Experience with program logic controllers.
- Proficient in document and data management tools.