The new Semilab SE-2000 spectroscopic ellipsometer has arrived at MIT.nano! The Semilab field service team will be coming to campus next week to install, qualify, and train the MIT.nano staff on the instrument. Part of this training will involve building a film model library that can be used as a framework for measuring films.
We intend to run a sampling of standard films from some of our PECVD and ALD systems (SiO2, SiNx, HfO2, ZrO2, Al2O3, etc). In addition, we would like to extend an invitation to MIT.nano users to provide sample films that we can model and fit into our library while the Semilab service engineer is onsite.
If you have a film sample or monitor that you would like to provide to us, please reach out to Paul Tierney or Kris Payer to arrange for transfer of the sample by Thursday, July 16. You can also email mitnano@mit.edu.
Note: Depending on the quantity of responses we receive, we may not be able to accommodate all requests. The Semilab service engineers will be able to provide remote support for modeling films, and there is also potential for future onsite visits as they are a local company. Training for the instrument itself will be available during the latter stages of our ramp-up. Please watch for announcements or check with Paul Tierney once the tool comes online in CORAL.