The new MLA-150, a direct-write laser system that can expose UV sensitive photoresist on wafers or masks, has arrived at MIT.nano and we unpacked it today! It's now positioned on the first floor awaiting installation and qualification (electrical and wall work taking place in the next few weeks). By early February, the MLA-150 should be operational, and will provide us with duplicate (and extended) capabilities over the MLA-150 already present in TRL.
For anyone interested in using the tool, we want to make sure you have access beforehand and are ready to use the tool the moment it goes online. To get MIT.nano fab access, you need to complete the MIT.nano orientation (we already had about 300 people participate!) and sign up in MUMMS. You can also follow these instructions to see how to join the EHS training group and add the right services in MUMMS.
See the whole MLA unpacking process in this photo story with captions below.
(Top row, left to right): We already went from the large crate (1) to the un-boxed parts (2) last week. Today we brought the parts into the cleanroom.The housing that controls the environmental conditions inside the tool was cleaned/wiped down (3).
(Middle row, left to right): To unpack the main unit, we wipe down the outer package (4), unwrap it and wipe down the clean wrap (5), and finally wipe down the actual tool (6).
(Bottom row, left to right): Now for the exciting part, we're ready to move the tool into the cleanroom (7). Now the tool is in the clean environment, and we can visualize how the installed footprint will be (8). Before the whole tool is installed and ready to use, all the utilities need to be installed, the wall cut out into the right shape, the system placed into final position.
There are a lot of cables to connect, and the manufacturer will need to do the installation, calibration, and ramp-up of the tool. So it's still a few more weeks of work before users will start doing research with the MLA-150. While you're waiting for the west lobby elevators, you can peek in and watch how things progress over the next six to eight weeks (9). While you're there, take the elevator up to the third floor to see the other tools that have already been up and running since early fall.