Now that we have made it through the first week of re-opening the fabs, here are a couple of helpful pointers on our tentative timeline and steps.
Returning users
- User check-in trainings via Zoom are ongoing. Sign up for an upcoming session here.
- There are new gowning area procedures and locker sign-ups. Read more in this document. Note that the hanger numbers for Fab 12 are going on this week.
24-hour access
- June 29: 24-hr access for current 24-hr users resumes
- July 10: New requests and qualification interviews for 24-hr access begin via Zoom.*
Hands-on tool trainings
We will gradually increase tool trainings (for tools that are “green” in CORAL). Details depend on tool and staff availability (current priority is bringing tools online). Our rough timeline is:
- June 29: Start similar tool training for current users
- July 20: Start new tool training for current users
The differentiation between similar vs. new tool is somewhat fuzzy, and depends on both tool and user experience level. Staff may initially test out new training procedures (such as Zoom or socially distant approaches) with experienced users who are good at providing feedback.
New fab users
Several users were in the process of getting ready for Fab.nano in March as we shut down, and we expect more new user requests with the incoming graduate students in the Fall. Because new user training is more complex, we are starting it after we have stabilized operations.
- Aug 10: Resume MIT.nano new user orientations (classroom, gowning, and quick-start). This assumes MIT is in phase 2 of its research ramp-up plans. If we’re still in phase 1 in August, this date will likely be modified.
Fab 12 wet benches
June 24: Resume Zoom classroom wet chemical processing training*
Use of any wet benches in Fab 12 requires two parts:
- Classroom training called wet chemical processing
- Tool-specific hands-on training with staff
This split allows us to offload theory and safety discussions from the in-person hands-on training.
Hands-on wet bench training (acid hoods, solvent hoods, developer stations) see above regarding hands-on tool training. We’re actively ramping up general-purpose wet benches (similar to TRL and EML acid-hoods), general purpose cleaning benches (similar to RCA-TRL or premetal piranha), KOH-TMAH, and electroplating / 2D transfer.
Fab 12 lithography
We are currently in the process of ramping up and qualifying the lithography tools in Fab 12, with the assistance of several experienced users. Once the tools are green in CORAL, they will fall under the “similar tool” training (see above). We appreciate your understanding that many users need to get trained on the litho tools in Fab 12. We will accommodate as much as possible, but please plan ahead and coordinate with the staff because of constraints in both staff time and quantity of requests. If you don’t need a specific tool just yet, the users who have deadlines and other urgent constraints will appreciate your patience.
The Fab 12 equivalents are (TRL coater = Spinner-AllPurpose for manual dispense, Spinner-Resist for plumbed, Spinner-EBL for HSQ/PMMA, Spinner-SU8 for SU8 only), (TRL MLA150 = DirectWrite-MLA150-OptAF). For EML tools (EML coater = combination of Spinner-AllPurpose, Spinner-SU8 or NanoMat AIR_Spincoater - depending on needs as approved/advised by ptc).
We’re in the process of installing an HMDS oven and a 8” barrel asher, timeline and details are TBD.
*Links to signups for 24-hour and wet bench trainings via Atlas are posted in the weekly PTC minutes. We’re in the process of adding more dates (the current ones are already waitlisted). Please add yourself to the waitlist so you automatically get notified when Atlas is adding more dates.
Disclaimer: All dates are tentative, and may change depending on our ramp-up experience and problems we encounter. We hope they help you plan, and they serve as a goal for us in ramping up operations. Needless to say, everything is subject to new constraints imposed on us by MIT or the state of Massachusetts.