Sponsored by Raith Nanofabrication
Wednesday, December 13, 2017
13-2137, Von Hippel Room
105 Massachusetts Ave (Rear)
Cambridge, MA 02139
10:00am–4:00pm
Agenda
10:00 AM | Introduction to Electron Beam Lithography (EBL) |
10:20 AM | EBPG Technology for Advanced EBL |
10:45 AM | State-of-the-Art EBL Applications Results with EBPG Technology |
11:45 AM | VOYAGER Technology, Sub-1Å Pitch Control with Zero Stitching Errors for Photonics, and other Workhorse Applications |
12:15 AM | EBL discussion / L U N C H |
1:00 PM | Advanced FIB Nanofabrication with Laser Interferometer Stage, Multiple Ion Species and Future Unique Capabilities |
2:00 PM | Unique Nanofabrication and Microscopy Applications with SEM-based EBL (including CD-SEM-Lite) and Helium/Neon Ion Microscope Instrumentation |
3:00 PM | Round Table Discussion – all topics |