May 2, 2022
The contractors are completing the exhaust installation for the new Arradiance ALD for oxides this weekend (April 30-May 1), and Arradiance will be onsite in the next two weeks to start up the tool and establish recipes.
A training schedule to be firmed up shortly. This system will take over the functionality of the ALD-Ozone (clean samples only, no organics). Precursors are TMA, TDMAHf, TDMAZr, BTBAS - for materials: Al2O3, HfO2, ZrO2, SiO2.
The tool name is ALD-Plasma-Arradiance-XTDP in CORAL.
Contact mitnano-feedback@mit.edu with any questions.