The Asher-Barrel-Thierry will go live this week in bay U06 in Building 12. The tool arrived at MIT.nano in December 2020 and has been undergoing installation. MIT.nano staff have prepared a training video (see below), and posted standard operating procedures (SOP) by the tool.
All ICL/TRL asher users will be automatically qualified on the tool. We ask that you simply read the SOP or watch the training video, below. Contact MIT.nano staff if you have any questions.
If you are not qualified yet (meaning you have no previous ICL/TRL asher usage), please contact Dave Terry for a short training.
The asher has a range of recipes, designated for resist removal (fast) and descum (slow). The asher is equivalent to the TRL asher (in terms of processes). It is not equivalent to the soft-litho asher, which serves a broader range of applications. Please do not use the aluminum weigh-scale dishes in the Asher. The venting is fast, and the small Al weigh scale dish will act like a big sail, and will fly all over the place. Other small-piece loading methods are okay: flat on the quartz plate, in a glass dish, on top of a glass dish, etc.
MIT.nano users can find the tool in CORAL: “Asher-Barrel-Thierry” under B-12 / Litho.