The Spinner-Resist-L10 (new tool) is now online in L10. For usage/what-to-spin, it is identical to Spinner-Resist-U12. This new spinner has a programmable exhaust during spinning, which can be beneficial when optimizing uniformity on thick resists.
Contact Scott Poesse for training. MIT.nano staff will transfer over all qualified users of the Spinner-Resist-U12 at the end of the week.
The 6.S059 class will be busy on the upper level coater and MLA this coming Friday, September 24; so that will be a good time to try out this new L10 spinner.