Spinner-EBL ready in Fab-12

Next week, we will start training users for the EBL (HSQ and PMMA) spinner in Fab-12 (B-12 / Litho / Spinner-EBL in Coral). We configured and tested the system this week with a beta-user, which helped us identify a few final improvements.

We hope this allows current EBL + Fab-12 users uninterrupted coating and developing during the Fab-39 mechanical week. Trainings will start on Thursday. Contact Dave Terry for scheduling.

FYI for PMMA users: We’re stocking 3:1 ready-mixed IPA:MIBK solutions for development, to reduce waste of both time and chemicals when developing.