Summer plan for Fab-39 to Fab-12 transition

This summer and fall, MIT.nano staff will heavily focus on helping to move remaining processes over from Fab-39 to 12. Below is the timeline for the month of July.

July 1: Hazardous gas operations
With fewer tools using hazardous gases in Fab-39, any gases which currently get turned off at night (silane, hydrogen, etc) will become on-demand only. Relevant tools: All LPCVD & wet oxidation furnaces, plasmatherm, Oxford-100 non-TEOS deposition. If you need to use a tool with hazardous gases in Fab-39: Reserve it in CORAL ahead of time. Then, contact staff the day before (or earlier) to coordinate gas turn-on/off times. Because two staff members must be on site to turn on/off hazardous gases, if your run starts late or extends into the evening hours, a second staff member may not available to stay late on short notice. Please try to start runs early, to avoid work getting delayed/postponed. Once you are done with the run, staff will turn off the gases.

July 7: Internal review of Fab-39 usage
MIT.nano will review the list of current Fab-39 tools and users to map out their needs and ability to move work over to Fab-12. We will analyze the last two years of data for each tool, but primarily focus on uses over the last 12 months (to focus on users with continued needs after the phase 2 tool move).

July/August: Collect and analyze user needs
To help us better understand user needs and evaluate alternatives, any user who needs Fab-39 tools after September 1st will need to submit to PTC for approval. Submission and review throughout the summer. Submissions should include the process and a brief justification of why a specific Fab-39 tool is critical for the work. PTC members and staff may then reach out to discuss further, understand requirements, and help find solution paths.

July/August: User discussions
MIT.nano will reach out to users and faculty groups who we identified as still relying on Fab-39 tools. In doing so, we will identify challenges and bottlenecks. Easy projects will be switched into new/equivalent tools in Fab-12. For more challenging needs, we can help identify backup equipment elsewhere. MIT.nano staff may be able to assist with process development and guidance. Our goal is that all movable projects are moving as soon as practical.

Please share any questions or concerns at and read the weekly MIT.nano digest for the most up-to-date and detailed information.