January 24, 2022
Both the VTR and the LAM590-TRL encountered hardware problems from the Building 39 power shutdown in November. As a result, we are unable to bring them back up, and the VTR and LAM590-TRL will be decommissioned.
With the AME5000 back online and the three SAMCO etchers taking on the role for fluorine and chlorine chemistry etching, and no tool uses since September on both, the ICL LAM490B and LAM590-ICL will be shut down on March 1st and then decommissioned.
Please let us know by February 7 if this will cause any problems, or if you need help moving processes to the SAMCOs. You can email mitnano-feedback@mit.edu.