Profile Control for III-V Compound Semiconductor Devices using Samco ICP-RIE Etching Tools
Date: Monday, October 2, 2023
Location: 12-0168 (MIT.nano basement)
Time: 11 a.m. – 1 p.m. ET
Lunch will be provided.
Register for this talk
Speaker: Dr. Tomoya Sugahara, Etching Manager, Samco R&D
During this seminar, Dr. Sugahara will discuss:
- AlInGaP etching for Micro Led and red laser devices
- AlGaAs/GaAs etching for VCSEL
- InGaAsP/InP grating etch
- InGaAsP/InP ridge
- AlGaN/GaN/InGaN etching for HEMT devices, blue laser, power devices and Micro Led
- Endpoint detection using interferometer