Samco tool talk—Oct. 2

Profile Control for III-V Compound Semiconductor Devices using Samco ICP-RIE Etching Tools

Date: Monday, October 2, 2023
Location: 12-0168 (MIT.nano basement)
Time: 11 a.m. – 1 p.m. ET
Lunch will be provided.

Register for this talk

Speaker: Dr. Tomoya Sugahara, Etching Manager, Samco R&D

During this seminar, Dr. Sugahara will discuss:

  • AlInGaP etching for Micro Led and red laser devices
  • AlGaAs/GaAs etching for VCSEL
  • InGaAsP/InP grating etch
  • InGaAsP/InP ridge
  • AlGaN/GaN/InGaN etching for HEMT devices, blue laser, power devices and Micro Led
  • Endpoint detection using interferometer