Facility Updates

Hotplate Testing in Progress

We're testing out different hotplates at MIT.nano and mapping their temperature uniformity so that photoresist can bake with high quality and uniformity.

Installation of the Anneal Tube

The anneal tube has been moved over to MIT.nano and is ready for testing after installation of gas, exhaust, and power.

Setting up the "Metrology Wall"

A rail for power, data, nitrogen/air/vacuum where tables and table-top metrology instruments (e.g. for film thickness measurement) can be placed.