The space is being prepared to receive the Rapid Thermal Anneal (RTA) tool later in August. Electrical (the RTA tool has a 125 amp fuse!), gases, and water cooling are seen on the rack.
Portable particle counter demonstration shows how strong an influence user activity and behavior have on the particular contamination that reaches a sample.
The new SAMCO fluorine-based reactive-ion etching has been bulk-headed in 6U and we're now getting ready to install gas lines, vacuum pumps, exhaust, and qualification.
