Facility Updates

The tabletop Scanning Electron Microscope (SEM) was moved in and positioned on September 5. Now, a few days later, the NeoSEM's pump and exhaust are connected in the chase.

The soft-lithography room asher has been moved, installed, tested and is ready to go at MIT.nano!

The EV620 (TRL EV1) mask aligner for the soft-lithography room was moved to MIT.nano last week. It has been installed, tested, and is now ready to go!

The G&P Chemical Mechanical Polishing (CMP) tool has been successfully moved and installed at MIT.nano!

The space is being prepared to receive the Rapid Thermal Anneal (RTA) tool later in August. Electrical (the RTA tool has a 125 amp fuse!), gases, and water cooling are seen on the rack.

Completed installation of the plasma-enhanced chemical vapor deposition (PECVD) and fluorine-based reactive-ion etching (RIE) at MIT.nano.