Facility Updates

We're testing out different hotplates at MIT.nano and mapping their temperature uniformity so that photoresist can bake with high quality and uniformity.

The Dektak 150 profilerometer was moved into the soft lithography space at MIT.nano.

The anneal tube has been moved over to MIT.nano and is ready for testing after installation of gas, exhaust, and power.

The AJA sputter tool is being moved into the MIT.nano cleanroom, going right next to the AJA evaporator.

A rail for power, data, nitrogen/air/vacuum where tables and table-top metrology instruments (e.g. for film thickness measurement) can be placed.

The AJA evaporator hook-up is nearing completion and the cryo pump has been installed.

The tabletop Scanning Electron Microscope (SEM) was moved in and positioned on September 5. Now, a few days later, the NeoSEM's pump and exhaust are connected in the chase.

The soft-lithography room asher has been moved, installed, tested and is ready to go at MIT.nano!

The EV620 (TRL EV1) mask aligner for the soft-lithography room was moved to MIT.nano last week. It has been installed, tested, and is now ready to go!